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Optical Probes – reliably fast measurements on challenging samples 


Optical Probes for thickness and distance measurements

The measurement range of the chromatic optical probes have a wide measuring range:  from a few microns up to millimeters allowing you to tailor the probe to your application.  High numerical aperture and small spot diameter are ideal for use in metrology.  images/OS0009t_Optical ProbesV3.JPG
The interferometric optical probe is of compact construction and thickness measurements of transparent thin films ranging from 2µm – 250µm (optical thickness) is easily attainable.

All probes have the following advantages:

  • Measurements also on highly tilted, reflective and dispersive surfaces
  • High axial resolution for the measurement of intricate structures
  • There are angled, space saving and flat probes available
  • Precise measurements independent of surface type
  • All probes are available in a vacuum version
  • robust and compact design
  • small spot diameter

images/0000pdf hi res.jpg Data Sheet – Optical Probes & Sensors